CPC G01S 7/4811 (2013.01) [B81B 3/0045 (2013.01); G01S 17/08 (2013.01); G01S 17/931 (2020.01); G02B 26/0858 (2013.01); G02B 26/10 (2013.01); G02B 27/0101 (2013.01); B81B 2201/042 (2013.01)] | 12 Claims |
1. A light deflector comprising:
a mirror having a reflecting surface configured to reflect light;
a pair of supports, one end of each of the pair of supports coupled to the mirror to support the mirror;
a pair of drive beams each coupled to the other end of a corresponding support of the pair of supports, the pair of drive beams being configured to deform the pair of supports to rotate the mirror around a first axis;
a frame supporting the pair of drive beams in a cantilevered state; and
connecting parts connecting the pair of drive beams to the pair of supports, respectively,
each of the connecting parts having:
a first area that is one of areas divided by the first axis on a plane parallel to the reflecting surface when the pair of drive beams are not operating, and the pair of drive beams are only located in the first area; and
a second area at an opposite side of the first area relative to the first axis,
the second area including a projection projecting in a direction opposite to a direction toward a portion at which a corresponding drive beam is supported by the frame, and
the projection including a first fillet of a fillet shape at an end proximate to a corresponding support of the pair of supports, the projection projects in a direction away from the first axis more than the pair of supports, and the projection is a free end that is free from undesired constraints when the mirror rotates.
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