US 12,140,571 B2
Testing assembly including a multiple degree of freedom stage
Edward Cyrankowski, Woodbury, MN (US); Syed Amanulla Syed Asif, Bloomington, MN (US); Ryan Major, Plymouth, MN (US); Derek Rasugu, Shakopee, MN (US); and Yuxin Feng, Plymouth, MN (US)
Assigned to Bruker Nano, Inc., Santa Barbara, CA (US)
Filed by Bruker Nano, Inc., Santa Barbara, CA (US)
Filed on Dec. 16, 2021, as Appl. No. 17/552,665.
Application 17/552,665 is a continuation of application No. 16/845,258, filed on Apr. 10, 2020, granted, now 11,237,087.
Application 16/845,258 is a continuation of application No. 15/295,196, filed on Oct. 17, 2016, granted, now 10,663,380.
Application 15/295,196 is a continuation of application No. 14/347,173, granted, now 9,472,374, previously published as PCT/US2012/058019, filed on Sep. 28, 2012.
Claims priority of provisional application 61/540,317, filed on Sep. 28, 2011.
Prior Publication US 2022/0357251 A1, Nov. 10, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 3/04 (2006.01); G01N 3/42 (2006.01); G02B 21/26 (2006.01); G02B 21/32 (2006.01); G21K 5/10 (2006.01); H01J 37/20 (2006.01)
CPC G01N 3/04 (2013.01) [G01N 3/42 (2013.01); G02B 21/26 (2013.01); G02B 21/32 (2013.01); G21K 5/10 (2013.01); H01J 37/20 (2013.01); G01N 2203/0026 (2013.01); G01N 2203/0206 (2013.01); H01J 2237/202 (2013.01); H01J 2237/2062 (2013.01); H01J 2237/28 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A method of using a testing assembly within a chamber of a multi-instrument assembly, the method comprising:
positioning a sample on a sample stage surface of a multiple degree of freedom sample stage, the sample stage surface within a localized coincidence region of the multi-instrument assembly, and the localized coincidence region includes a plurality of overlapping working regions, the plurality of overlapping working regions includes at least first and second working regions of first and second instruments;
conducting testing of the sample in a first orientation of the sample stage surface with the first instrument of the multi-instrument assembly, the sample within the first working region of the first instrument;
orienting the sample stage surface and the sample to a second orientation relative to the second instrument of the multi-instrument assembly, the sample within the second working region of the second instrument, and orienting to the second orientation includes:
translating the sample stage surface with at least one linear stage of the multiple degree of freedom sample stage;
one or more of rotating or tilting the sample stage surface with one or more of a rotation stage or a tilt stage of the multiple degree of freedom sample stage; and
maintaining the sample stage surface within the localized coincidence region while orienting;
conducting testing of the sample in the second orientation of the sample stage surface with the second instrument;
conducting testing of the sample with a mechanical testing instrument; and
wherein each of the mechanical testing instrument and the multiple degree of freedom sample stage are installed to a testing assembly platform, and the testing assembly platform spaces each of the mechanical testing instrument and the multiple degree of freedom sample stage from walls of the chamber of the multi-instrument assembly.