US 12,140,514 B2
Sensor and method for performing a reference measurement with guided thermal radiation
Gerald Stocker, Finkenstein (AT); Elmar Aschauer, Ledenitzen (AT); Ulf Bartl, Villach (AT); Thomas Grille, Nötsch (AT); Christoph Kovatsch, Finkenstein (AT); and Thomas Krotscheck Ostermann, Velden am Wörthersee (AT)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Apr. 8, 2022, as Appl. No. 17/658,554.
Claims priority of application No. 21177166 (EP), filed on Jun. 1, 2021.
Prior Publication US 2022/0381659 A1, Dec. 1, 2022
Int. Cl. G01N 1/44 (2006.01); G01K 7/01 (2006.01); G01N 33/00 (2006.01)
CPC G01N 1/44 (2013.01) [G01K 7/01 (2013.01); G01N 33/004 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fluid sensor for performing a reference measurement, the fluid sensor comprising:
a support structure having a top main surface region, wherein the top main surface region of the support structure forms a common system plane of the fluid sensor;
a thermal emitter on the top main surface region of the support structure, wherein the thermal emitter is configured to emit thermal radiation;
a first waveguide section on the top main surface region of the support structure;
a first thermal radiation detector on the top main surface region of the support structure;
a cover structure on at least one part of the first waveguide section, wherein the cover structure seals a defined atmosphere or a defined fluid in the at least one part of the first waveguide section;
wherein the first waveguide section is configured to guide a guided first portion of the thermal radiation emitted by the thermal emitter to the first thermal radiation detector;
wherein the first thermal radiation detector is configured to detect the guided first portion of the thermal radiation for performing the reference measurement; and
wherein the guided first portion of the thermal radiation comprises an information about measuring conditions of the fluid sensor.