US 12,140,339 B2
Filter isolation for equipment front end module
James Christopher Hansen, Sunnyvale, CA (US); Steven Trey Tindel, Austin, TX (US); and Paul B. Reuter, Austin, TX (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Oct. 13, 2022, as Appl. No. 18/046,290.
Prior Publication US 2024/0125491 A1, Apr. 18, 2024
Int. Cl. F24F 3/16 (2021.01); B01D 46/00 (2022.01); B01D 50/00 (2022.01); F24F 3/163 (2021.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01)
CPC F24F 3/163 (2021.01) [B01D 46/00 (2013.01); B01D 50/00 (2013.01); H01L 21/67389 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An equipment front end module (EFEM), comprising:
an EFEM chamber formed between a plurality of walls of the EFEM;
an upper plenum above the EFEM chamber, the upper plenum in fluid communication with the EFEM chamber;
a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum;
one or more filters that separate the upper plenum from the EFEM chamber;
one or more fan openings along the return gas flow path between the plurality of ducts and the upper plenum;
one or more fans disposed proximate each of the one or more fan openings; and
an isolation gate configured to block the one or more fan openings responsive to the isolation gate being actuated to a closed position, wherein while the isolation gate is in the closed position the one or more filters are isolated from an ambient environment responsive to a gas being flowed through the upper plenum when the EFEM chamber is opened to the ambient environment.