US 12,140,168 B2
Flat head units for heavy load alignment
Hassan Yousefi, Santa Clara, CA (US); Ganesh Babu Chandrasekaran, Santa Clara, CA (US); Robin L. Tiner, Santa Cruz, CA (US); Jianhua Zhou, Campbell, CA (US); and Isami Iguchi, Tokyo (JP)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 14, 2021, as Appl. No. 17/229,998.
Claims priority of provisional application 63/139,858, filed on Jan. 21, 2021.
Prior Publication US 2022/0228616 A1, Jul. 21, 2022
Int. Cl. B23Q 3/18 (2006.01); F16B 19/02 (2006.01)
CPC F16B 19/02 (2013.01) [B23Q 3/18 (2013.01); B23Q 3/183 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A mask frame support unit comprising:
a case;
a protruding body extending below the case, the protruding body comprising a tapered region and a cylindrical region, the tapered region comprising a first end having a first diameter coupled to the case and comprising a second end having a second diameter opposite the first end of the tapered region, wherein the second diameter is less than the first diameter, and wherein the tapered region is coupled to the cylindrical region at the second end of the tapered region; and
a station having a flat head disposed above the case;
wherein the case houses a plurality of components comprising:
an upper receiving plate in contact with the station;
a lower receiving plate disposed underneath the upper receiving plate;
a flat head unit movement support mechanism disposed between the lower receiving plate and the protruding body; and
a centering component.