US 12,140,134 B2
Fluid control apparatus
Nobuhira Tanaka, Kyoto (JP); and Yutoku Kawabata, Kyoto (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Kyoto (JP)
Filed on Dec. 30, 2021, as Appl. No. 17/646,497.
Application 17/646,497 is a continuation of application No. PCT/JP2020/019176, filed on May 14, 2020.
Claims priority of application No. 2019-124101 (JP), filed on Jul. 3, 2019.
Prior Publication US 2022/0120268 A1, Apr. 21, 2022
Int. Cl. F04B 43/04 (2006.01); F04B 43/00 (2006.01)
CPC F04B 43/046 (2013.01) [F04B 43/0054 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fluid control apparatus comprising:
a first major plate having a first major surface and a second major surface;
a second major plate having a third major surface and a fourth major surface, the third major surface facing the first major surface;
a peripheral plate connecting the first major plate and the second major plate to each other; and
a pump chamber enclosed by the first major plate, the second major plate, and the peripheral plate,
wherein the first major plate includes a central portion; a frame portion provided around a circumference of the central portion; at least one supporting portion connected to the frame portion and to the central portion and supporting the central portion such that the central portion is vibratable; and a first opening provided between the central portion and the frame portion and connecting the pump chamber and an outside area near the second major surface to each other,
wherein the second major plate includes a second opening connecting the pump chamber and an outside area near the fourth major surface to each other,
wherein the fluid control apparatus further includes
a piezoelectric device provided on the central portion and configured to vibrate the central portion;
a first film provided on the first major surface, wherein the first film has a first movable portion, and one end of the first movable portion serves as a first movable end; and
a second film provided on the third major surface, wherein the second film has a second movable portion, and one end of the second movable portion serves as a second movable end, and
wherein the first film and the second film are positioned between the first opening and the second opening.