US 12,140,130 B2
Cryopanel structure for a cryopump
Gerald Szarek, Chelmsford, MA (US)
Assigned to Edwards Vacuum LLC, Sanborn, NY (US)
Appl. No. 18/004,381
Filed by Edwards Vacuum LLC, Sanborn, NY (US)
PCT Filed Jul. 6, 2021, PCT No. PCT/IB2021/056043
§ 371(c)(1), (2) Date Jan. 5, 2023,
PCT Pub. No. WO2022/009088, PCT Pub. Date Jan. 13, 2022.
Claims priority of application No. 2010468 (GB), filed on Jul. 8, 2020.
Prior Publication US 2023/0279848 A1, Sep. 7, 2023
Int. Cl. F04B 37/08 (2006.01)
CPC F04B 37/08 (2013.01) 16 Claims
OG exemplary drawing
 
1. A cryopump comprising:
a pump inlet;
a two stage refrigerator;
a first stage array thermally coupled to a first stage of said two stage refrigerator; and
a cryopanel structure coupled to a second stage of said two stage refrigerator; wherein
said cryopanel structure comprises at least three flat panels;
said first stage array being mounted between said pump inlet and said cryopanel structure, and comprising a plurality of slats, said plurality of slats each being mounted such that a respective edge of each of said plurality of slats closest to said cryopanel structure extends along a first line and is offset longitudinally with respect to a top edge of a corresponding one of said at least three flat panels, wherein the top edge extends along a second line that is parallel to the first line.