US 12,140,129 B2
Cryopump
Kakeru Takahashi, Tokyo (JP)
Assigned to SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo (JP)
Filed by SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo (JP)
Filed on Mar. 5, 2021, as Appl. No. 17/193,696.
Application 17/193,696 is a continuation of application No. PCT/JP2019/030303, filed on Aug. 1, 2019.
Claims priority of application No. 2018-167178 (JP), filed on Sep. 6, 2018.
Prior Publication US 2021/0190058 A1, Jun. 24, 2021
Int. Cl. F04B 39/06 (2006.01); F04B 37/08 (2006.01)
CPC F04B 37/08 (2013.01) [F04B 39/064 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A cryopump comprising:
a cryopump housing including a cryopump intake port;
a radiation shield that is disposed inside the cryopump housing in a non-contact manner with the cryopump housing and is cooled to a shield cooling temperature;
a thermal resistance member formed of a material having a thermal conductivity lower than that of a material of the radiation shield, or a heat insulating material; and
a heat shielding dummy panel that is disposed at the cryopump intake port and mounted to the radiation shield through the thermal resistance member such that a dummy panel temperature becomes higher than the shield cooling temperature.