US 12,139,793 B2
CVD device component provided with an individual identifier, and method for communicating information
Matthias Johannes Bode, Gemmenich (BE); Thomas Schmitt, Mönchengladbach (DE); Micha Cornel Franke, Herzogenrath (DE); and Markus Mohnen, Herzogenrath (DE)
Assigned to AIXTRON SE, Herzongenrath (DE)
Appl. No. 17/041,727
Filed by AIXTRON SE, Herzogenrath (DE)
PCT Filed Mar. 26, 2019, PCT No. PCT/EP2019/057493
§ 371(c)(1), (2) Date Sep. 25, 2020,
PCT Pub. No. WO2019/185574, PCT Pub. Date Oct. 3, 2019.
Claims priority of application No. 10 2018 107 135.3 (DE), filed on Mar. 26, 2018.
Prior Publication US 2021/0010138 A1, Jan. 14, 2021
Int. Cl. C23C 16/52 (2006.01); G06K 19/06 (2006.01)
CPC C23C 16/52 (2013.01) [G06K 19/06028 (2013.01); G06K 19/06037 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A device (1) for thermally treating at least one substrate (6), the device (1) comprising:
a controller (15);
a sensor (14) communicatively coupled to the controller (15); and
a component (10, 11, 12, 13) comprising:
a first surface;
a second surface facing away from the first surface and facing towards the sensor (14);
structured regions with spatial structures (7, 8) on the first surface, at least two of which are different from one another, and which collectively form a machine-readable identifier (16) of the component (10, 11, 12, 13); and
surface regions (17, 18) on the second surface, each of the surface regions corresponding to one of the structures (7, 8) on the first surface,
wherein during the thermal treatment of the at least one substrate (6), the component (10, 11, 12, 13) is heated with a heating unit (5) to at least a first temperature at which at least two of the surface regions (17, 18) are optically distinguishable from one another with the sensor (14) based on a level of a signal (20) from the sensor (14),
wherein the signal (20) from the sensor (14) captures temperature fluctuations across the surface regions (17, 18) on the second surface of the component (10, 11, 12, 13), the temperature fluctuations corresponding to the spatial structures (7, 8) on the first surface of the component (10, 11, 12, 13), and
wherein the controller (15) is configured to process the temperature fluctuations on the second surface in order to identify the component (10, 11, 12, 13).