US 12,139,790 B2
Processing system and method of delivering a reactant gas
Vishwas Kumar Pandey, Madhya Pradesh (IN); Christopher Olsen, Fremont, CA (US); Rene George, San Carlos, CA (US); Eric Shono, San Mateo, CA (US); Lara Hawrylchak, Gilroy, CA (US); Erika Hansen, San Jose, CA (US); Tobin Kaufman-Osborn, Sunnyvale, CA (US); Hansel Lo, San Jose, CA (US); and Kartik Shah, Saratoga, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Appl. No. 17/753,524
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Sep. 9, 2020, PCT No. PCT/US2020/049853
§ 371(c)(1), (2) Date Mar. 7, 2022,
PCT Pub. No. WO2021/050489, PCT Pub. Date Mar. 18, 2021.
Application 17/753,524 is a continuation of application No. 16/776,204, filed on Jan. 29, 2020, granted, now 11,486,038.
Claims priority of provisional application 62/897,900, filed on Sep. 9, 2019.
Prior Publication US 2022/0411927 A1, Dec. 29, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01)
CPC C23C 16/45517 (2013.01) [C23C 16/40 (2013.01); C23C 16/45563 (2013.01); C23C 16/45582 (2013.01); C23C 16/45587 (2013.01); C23C 16/45591 (2013.01); C23C 16/4584 (2013.01); C23C 16/52 (2013.01); H01L 21/67017 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An injection cone, comprising:
a body, comprising:
a first portion configured to deliver a reactant gas, the first portion comprising:
a bottom surface; and
a linear rudder, the linear rudder making an angle with an axis parallel to the bottom surface, the angle being from about 10° to about 40°; and
a second portion configured to accept the reactant gas, the first portion and the second portion separated by a dividing line.