US 12,139,634 B2
Silylated isocyanurate compound, metal corrosion inhibitor, curable organosilicon resin composition, and semiconductor apparatus
Tomoyuki Mizunashi, Annaka (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed by SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed on Mar. 29, 2021, as Appl. No. 17/216,020.
Claims priority of application No. 2020-072496 (JP), filed on Apr. 14, 2020; and application No. 2020-072522 (JP), filed on Apr. 14, 2020.
Prior Publication US 2022/0064382 A1, Mar. 3, 2022
Int. Cl. C09D 183/04 (2006.01); C07F 7/08 (2006.01); C07F 7/18 (2006.01); C08G 77/12 (2006.01); C08G 77/20 (2006.01); C08G 77/26 (2006.01); C23F 11/00 (2006.01); C23F 11/14 (2006.01); H01L 23/29 (2006.01); H01L 33/56 (2010.01); C08G 77/00 (2006.01)
CPC C09D 183/04 (2013.01) [C07F 7/0812 (2013.01); C07F 7/1804 (2013.01); C07F 7/188 (2013.01); C08G 77/12 (2013.01); C08G 77/20 (2013.01); C08G 77/26 (2013.01); C23F 11/00 (2013.01); C23F 11/149 (2013.01); H01L 23/296 (2013.01); H01L 33/56 (2013.01); C08G 77/80 (2013.01)] 11 Claims
 
1. A curable organosilicon resin composition comprising:
(A) an organosilicon compound having at least two alkenyl groups per molecule;
(B) an organosilicon compound having at least two hydrogen atoms bonded to silicon atoms per molecule, wherein an amount of SiH groups in the component (B) is 0.1 to 4.0 mol relative to 1 mol of alkenyl groups in the component (A);
(C) a platinum group metal-based catalyst; and
(D) a silylated isocyanurate compound as a metal corrosion inhibitor shown by the following general formula (1), wherein the component (A) comprises
(A1) a resinous organopolysiloxane comprising
at least two silicon atom-bonded alkenyl groups per molecule, and
at least any of an SiO4/2 unit and an R4SiO3/2 unit, wherein R4 represents an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or an aryl group having 6 to 10 carbon atoms, wherein
the component (A1) is a resinous organopolysiloxane comprising
0 to 60 mol % of the SiO4/2 unit,
0 to 90 mol % of the R4SiO3/2 unit,
0 to 50 mol % of an (R4)2SiO2/2 unit, and
10 to 50 mol % of an (R4)3SiO1/2 unit, given that a sum of the SiQ4/2 unit and the R4SiO3/2 unit is 50 mol % or more,
the organopolysiloxane has a weight-average molecular weight of 1,000 to 5,000,
the organopolysiloxane has at least two silicon atom-bonded alkenyl groups per molecule,
the organopolysiloxane has a hydroxyl group and an alkoxy group each of which is bonded to a silicon atom and is an uncondensed remainder derived from the SiO4/2 unit, the R4SiO3/2 unit, the (R4)2SiO2/2 unit, and the (R4)3SiO4/2 unit,
the hydroxyl group is in an amount of 0.001 to 1.0 mol/100 g, and
the alkoxy group bonded to a silicon atom has 1 to 10 carbon atoms and is in an amount of not more than 1.0 mol/100 g,

OG Complex Work Unit Chemistry
wherein R's each independently represent a hydrogen atom, or a substituent selected from the group consisting of an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, and a group shown by the following general formula (2-a) or (2-b), given that at least one of the R's is shown by the following general formula (2-b),

OG Complex Work Unit Chemistry
wherein R1 represents a hydrogen atom or an alkyl group having 1 to 8 carbon atoms; “q” represents an integer of 1 to 10; R2's each independently represent a hydrogen atom, or a substituent selected from the group consisting of an alkyl group having 1 to 10 carbon atoms and a group shown by the following general formula (3), given that at least one of the R2's is shown by the following general formula (3); and R4 represents a hydrogen atom or OR2,

OG Complex Work Unit Chemistry
wherein R3's each independently represent a hydrogen atom, or a substituent selected from the group consisting of an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, and an aryl group having 6 to 10 carbon atoms.