US 12,139,436 B2
Droplet generator nozzle
Dietmar Uwe Herbert Trees, San Diego, CA (US); Edwin Johan Buis, Belfeld (NL); Theodorus Wilhelmus Driessen, San Diego, CA (US); Benjamin Andrew Sams, San Diego, CA (US); and Brandon Michael Johnson, Escondido, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/767,179
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Oct. 9, 2020, PCT No. PCT/EP2020/078518
§ 371(c)(1), (2) Date Apr. 7, 2022,
PCT Pub. No. WO2021/074043, PCT Pub. Date Apr. 22, 2021.
Claims priority of provisional application 62/916,723, filed on Oct. 17, 2019.
Prior Publication US 2022/0363596 A1, Nov. 17, 2022
Int. Cl. H05G 2/00 (2006.01); C03C 27/02 (2006.01); G03F 7/00 (2006.01)
CPC C03C 27/02 (2013.01) [G03F 7/70033 (2013.01); H05G 2/006 (2013.01); H05G 2/008 (2013.01); C03C 2203/52 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing a nozzle for a droplet generator, the method comprising:
disposing a glass capillary in a throughbore of a metal fitting;
heating the metal fitting; and
applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore.