US 12,138,926 B2
Piezoelectric substrate, piezoelectric element and liquid ejection head
Yasuaki Hamada, Nagano (JP); Tomohiro Sakai, Nagano (JP); Toshihiro Shimizu, Fujimi-machi (JP); and Masao Nakayama, Nagano (JP)
Assigned to Seiko Epson Corporation, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Dec. 21, 2022, as Appl. No. 18/069,270.
Claims priority of application No. 2021-209176 (JP), filed on Dec. 23, 2021.
Prior Publication US 2023/0202173 A1, Jun. 29, 2023
Int. Cl. B41J 2/14 (2006.01); H10N 30/00 (2023.01); H10N 30/20 (2023.01); H10N 30/853 (2023.01)
CPC B41J 2/14201 (2013.01) [H10N 30/2047 (2023.02); H10N 30/708 (2024.05); H10N 30/8542 (2023.02); B41J 2002/14306 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A piezoelectric substrate, comprising:
a substrate;
a first electrode formed on the substrate; and
a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium, wherein a full width at half maximum of an X-ray intensity peak on a plane (100) of the piezoelectric layer in a Psi axis-direction scan result of an X-ray diffraction measurement in which a surface of the piezoelectric layer is irradiated with X-rays at an angle of 54.74° from a direction perpendicular to the surface is more than 0° and 1.2° or less.