US 12,138,913 B2
Control unit and substrate treating apparatus including the same
Yeon Chul Song, Seoul (KR); Myeong Jun Lim, Gyeonggi-do (KR); Kwang Sup Kim, Chungcheongnam-do (KR); Jong Min Lee, Gyeonggi-do (KR); Jun Ho Oh, Gyeonggi-do (KR); Ji Hoon Yoo, Gyeonggi-do (KR); and Young Ho Park, Incheon (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-Do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Jul. 29, 2022, as Appl. No. 17/876,545.
Claims priority of application No. 10-2021-0130203 (KR), filed on Sep. 30, 2021.
Prior Publication US 2023/0101546 A1, Mar. 30, 2023
Int. Cl. B41J 2/045 (2006.01); B41J 29/20 (2006.01); B41J 2/165 (2006.01)
CPC B41J 2/04513 (2013.01) [B41J 2/04581 (2013.01); B41J 29/20 (2013.01); B41J 2/165 (2013.01); B41J 2/16579 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A control unit for performing maintenance of an inkjet head unit for discharging a substrate treatment liquid onto a substrate comprising:
a count module for counting the number of discharges for each nozzle of the inkjet head unit;
a comparison module for comparing the number of discharges with a reference value to determine whether the number of discharges is equal to or greater than the reference value; and
an evaluation module for evaluating whether a life of the inkjet head unit has reached a usable life based on whether the number of discharges of each nozzle is equal to or greater than the reference value,
wherein the count module counts the number of discharges based on whether a voltage is applied to a piezoelectric element involved in operation of a nozzle.