US 12,138,745 B2
Apparatus and method for coating removal
M Ziaul Karim, San Jose, CA (US); and Dragan Cekic, Princeton, NJ (US)
Assigned to YIELD ENGINEERING SYSTEMS, INC., Fremont, CA (US)
Filed by Yield Engineering Systems, Inc., Fremont, CA (US)
Filed on Mar. 22, 2023, as Appl. No. 18/124,871.
Prior Publication US 2024/0316727 A1, Sep. 26, 2024
Int. Cl. B24C 1/08 (2006.01); B24C 3/12 (2006.01); B24C 5/04 (2006.01); B24C 11/00 (2006.01)
CPC B24C 1/086 (2013.01) [B24C 3/12 (2013.01); B24C 5/04 (2013.01); B24C 11/00 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of removing a coating from a coated surface of a substrate, comprising:
positioning a nozzle of an apparatus proximate a coated surface of a substrate such that a longitudinal axis of a distal end of the nozzle is inclined at an angle θ with the coated surface, wherein the nozzle includes an inner conduit having an orifice and an outer conduit coaxially arranged about the inner conduit and defining an annular opening between the inner and outer conduits, and wherein the inner conduit extends further along the longitudinal axis than the outer conduit such that the orifice is spaced apart from the annular opening along the longitudinal axis;
directing a liquid stream through the orifice of the inner conduit toward the coated surface;
directing a gas flow through the annular opening toward the coated surface such that the gas flow surrounds the liquid stream from the orifice; and
impinging at least a portion of the liquid stream emanating from the orifice on the coated surface without intermixing with the gas emanating from the annular opening to remove at least a portion of a coating of the coated surface.