US 12,138,671 B2
Substrate treatment device
Minami Nakamura, Yokohama (JP); Daisuke Matsushima, Yokohama (JP); and Kensuke Demura, Yokohama (JP)
Assigned to SHIBAURA MECHATRONICS CORPORATION, Kanagawa (JP)
Filed by Shibaura Mechatronics Corporation, Yokohama (JP)
Filed on Feb. 22, 2021, as Appl. No. 17/181,227.
Claims priority of application No. 2020-029911 (JP), filed on Feb. 25, 2020; application No. 2020-207678 (JP), filed on Dec. 15, 2020; and application No. 2021-018927 (JP), filed on Feb. 9, 2021.
Prior Publication US 2021/0276055 A1, Sep. 9, 2021
Int. Cl. B08B 7/00 (2006.01); B08B 3/10 (2006.01); B08B 7/04 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); G03F 1/82 (2012.01)
CPC B08B 7/0092 (2013.01) [B08B 3/10 (2013.01); B08B 7/04 (2013.01); G03F 7/70925 (2013.01); H01L 21/67051 (2013.01); H01L 21/68764 (2013.01); B08B 7/0014 (2013.01); G03F 1/82 (2013.01); H01L 21/67109 (2013.01); H01L 21/67253 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A substrate treatment device: comprising:
a placement stand configured to rotate a substrate;
a cooling part configured to supply a cooling gas into a space between the placement stand and the substrate;
a liquid supplier configured to supply a liquid on a surface of the substrate opposite to the placement stand side;
a detector configured to detect a state of the liquid on the surface of the substrate, the state of the liquid being a temperature of the liquid or a cloudy state of the liquid; and
a controller controlling at least one of a rotation speed of the substrate, a flow rate of the cooling gas, or a supply amount of the liquid,
the controller setting the liquid on the surface of the substrate to be in a supercooled state by controlling at least one of a rotation speed of the substrate, a flow rate of the cooling gas, and a supply amount of the liquid, detecting timing of start of freezing of the liquid in the supercooled state based on data of the temperature of the liquid or data of the cloudy state of the liquid from the detector, and starting thawing of the liquid in a state of solid-liquid phase has elapsed based on the detected timing of the start of freezing.