US 12,138,663 B2
Sorting apparatus for sorting objects and measurement apparatus
Shigeki Kato, Tochigi (JP); Takuya Shimada, Tochigi (JP); and Shinzo Uchiyama, Tochigi (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Apr. 28, 2023, as Appl. No. 18/309,502.
Claims priority of application No. 2022-078799 (JP), filed on May 12, 2022.
Prior Publication US 2023/0364652 A1, Nov. 16, 2023
Int. Cl. G01N 21/85 (2006.01); B07C 5/00 (2006.01); B07C 5/10 (2006.01); B07C 5/342 (2006.01); G01N 21/25 (2006.01); G01N 33/44 (2006.01)
CPC B07C 5/3422 (2013.01) [B07C 5/10 (2013.01); G01N 21/255 (2013.01); G01N 33/44 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A measurement apparatus comprising:
a scanning unit configured to move illumination light to illuminate an object configured to move;
a control unit configured to control the scanning unit; and
a sensor configured to measure reflection light from the illuminated object,
wherein the control unit controls the scanning unit so that the illumination light from the scanning unit to illuminate the object tracks the moving object, and
wherein the sensor includes a spectroscopic unit configured to disperse scattering light from the object illuminated by the illumination light.