| CPC B05B 15/40 (2018.02) [B01D 29/50 (2013.01); B01D 29/01 (2013.01)] | 17 Claims |

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1. A micro-nozzle with an integrated filter structure for receiving fluids at pressures between 0.1 MPa to 50 MPa, comprising:
at least one fluid inlet;
a fluid outlet comprising at least one orifice; and
a primary filter structure positioned downstream from the at least one fluid inlet and arranged to provide statistical filtration of fluid passing therethrough, the primary filter structure comprising a plurality of first elements spaced apart a distance greater than a diameter of the at least one orifice of the outlet,
wherein each of the first elements comprises a plurality of sub-elements which are laterally spaced apart a distance less than the distance at which the plurality of first elements is laterally spaced apart,
wherein the first elements are arranged with a staggered configuration whereby to define a plurality of meandering flow paths for the fluid,
wherein the distance between the plurality of sub-elements is configured to generate a lower pressure region between the plurality of sub-elements relative to a pressure between adjacent first elements.
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