US 12,471,326 B2
Guard ring and circuit device
Wan-Yen Lin, Hsinchu (TW); Wun-Jie Lin, Hsinchu (TW); Yu-Ti Su, Hsinchu (TW); Bo-Ting Chen, Hsinchu (TW); Jen-Chou Tseng, Hsinchu (TW); Kuo-Ji Chen, Hsinchu (TW); Sun-Jay Chang, Hsinchu (TW); and Min-Chang Liang, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on Jul. 26, 2022, as Appl. No. 17/815,004.
Application 16/952,305 is a division of application No. 16/185,526, filed on Nov. 9, 2018, granted, now 10,868,112, issued on Dec. 15, 2020.
Application 15/242,894 is a division of application No. 14/464,298, filed on Aug. 20, 2014, granted, now 9,450,044, issued on Sep. 20, 2016.
Application 17/815,004 is a continuation of application No. 16/952,305, filed on Nov. 19, 2020, granted, now 11,450,735.
Application 16/185,526 is a continuation of application No. 15/242,894, filed on Aug. 22, 2016, granted, now 10,128,329, issued on Nov. 13, 2018.
Prior Publication US 2022/0359648 A1, Nov. 10, 2022
Int. Cl. H10D 62/10 (2025.01); H01L 21/265 (2006.01); H01L 21/76 (2006.01); H01L 21/761 (2006.01); H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/83 (2025.01); H10D 89/10 (2025.01); H10D 89/60 (2025.01)
CPC H10D 62/106 (2025.01) [H01L 21/26513 (2013.01); H01L 21/76 (2013.01); H01L 21/761 (2013.01); H10D 30/024 (2025.01); H10D 30/62 (2025.01); H10D 62/114 (2025.01); H10D 84/0151 (2025.01); H10D 84/0158 (2025.01); H10D 84/038 (2025.01); H10D 84/834 (2025.01); H10D 89/10 (2025.01); H10D 89/601 (2025.01)] 4 Claims
OG exemplary drawing
 
1. A circuit device comprising:
core circuitry;
a first plurality of guard rings having a first dopant type, wherein the first plurality of guard rings is around a periphery of the core circuitry, wherein a surface, closest to the core circuitry, of a first guard ring of the first plurality of guard rings is coplanar with a surface, closest to the core circuitry, of a second guard ring of the first plurality of guard rings; and
a second plurality of guard rings having a second dopant type, wherein the second dopant type is opposite to the first dopant type, and at least one guard ring of the second plurality of guard rings is around a periphery of at least one guard ring of the first plurality of guard rings.