US 12,471,276 B2
Semiconductor storage device and method of manufacturing semiconductor storage device
Kazutaka Suzuki, Kuwana (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Jun. 13, 2022, as Appl. No. 17/806,545.
Claims priority of application No. 2022-045388 (JP), filed on Mar. 22, 2022.
Prior Publication US 2023/0328974 A1, Oct. 12, 2023
Int. Cl. H10B 41/27 (2023.01); H10B 41/10 (2023.01); H10B 41/35 (2023.01); H10B 43/10 (2023.01); H10B 43/27 (2023.01); H10B 43/35 (2023.01)
CPC H10B 41/27 (2023.02) [H10B 41/10 (2023.02); H10B 41/35 (2023.02); H10B 43/10 (2023.02); H10B 43/27 (2023.02); H10B 43/35 (2023.02)] 9 Claims
OG exemplary drawing
 
1. A semiconductor storage device comprising:
a multi-layered body including a plurality of gate electrode layers and a plurality of insulating layers, the plurality of the gate electrode layers and the plurality of the insulating layers being alternately stacked one layer by one layer in a first direction in the multi-layered body;
a first dividing part penetrating the multi-layered body in the first direction, the first dividing part extending in a second direction, the first dividing part dividing each of the plurality of the gate electrode layers in a third direction, the second direction being different from the first direction, the third direction being different from the first direction and the second direction;
a second dividing part separated from the first dividing part in the third direction, the second dividing part penetrating the multi-layered body in the first direction, the second dividing part dividing each of the plurality of the gate electrode layers in the third direction;
a third dividing part between the first dividing part and the second dividing part, the third dividing part dividing each of the plurality of the gate electrode layers in the third direction, the third dividing part including a plurality of first columnar bodies, the plurality of the first columnar bodies extending in the first direction in the multi-layered body, the plurality of the first columnar bodies having outer circumferential portions, the plurality of the first columnar bodies having insulating properties at least in the outer circumferential portions of the plurality of the first columnar bodies, the plurality of the first columnar bodies being aligned in the second direction;
a plurality of second columnar bodies between the first dividing part and the third dividing part, the plurality of the second columnar bodies extending in the first direction in the multi-layered body, each of the plurality of the second columnar bodies including a charge storage and a channel layer; and
a plurality of third columnar bodies between the second dividing part and the third dividing part, the plurality of the third columnar bodies extending in the first direction in the multi-layered body, each of the plurality of the third columnar bodies including a charge storage and a channel layer, wherein
a width of each of the plurality of the first columnar bodies in the second direction is larger than a distance between two second columnar bodies adjacent in the second direction included in the plurality of the second columnar bodies or larger than a distance between two third columnar bodies adjacent in the second direction included in the plurality of the third columnar bodies,
the third dividing part further includes a plurality of fourth columnar bodies,
the plurality of the fourth columnar bodies extend in the first direction in the multi-layered body,
the plurality of the fourth columnar bodies have outer circumferential portions,
the plurality of the fourth columnar bodies have insulating properties at least in the outer circumferential portions of the plurality of the fourth columnar bodies,
the plurality of the fourth columnar bodies are aligned in the second direction,
each of the outer circumferential portions of the plurality of the first columnar bodies is in contact with outer circumferential portions of two fourth columnar bodies included in the plurality of the fourth columnar bodies,
the third dividing part further includes a plurality of fifth columnar bodies,
the plurality of the fifth columnar bodies extend in the first direction in the multi-layered body,
the plurality of the fifth columnar bodies have outer circumferential portions,
the plurality of the fifth columnar bodies have insulating properties at least in the outer circumferential portions of the plurality of the fifth columnar bodies,
the plurality of the fifth columnar bodies are aligned in the second direction, and
each of the outer circumferential portions of the plurality of the first columnar bodies is in contact with outer circumferential portions of two fifth columnar bodies included in the plurality of the fifth columnar bodies.