US 12,470,874 B2
MEMS device and method for operating a MEMS device
Christian Bretthauer, Munich (DE); Andreas Bogner, Munich (DE); Gabriele Bosetti, Munich (DE); and Niccoló De Milleri, Villach (AT)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on May 12, 2023, as Appl. No. 18/316,589.
Claims priority of application No. 22176931 (EP), filed on Jun. 2, 2022.
Prior Publication US 2023/0396930 A1, Dec. 7, 2023
Int. Cl. H04R 17/00 (2006.01)
CPC H04R 17/00 (2013.01) [H04R 2201/003 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical system (MEMS) device comprising:
a piezoelectric transducer element having a first transducer region and a second transducer region;
a deflectable structure comprising the piezoelectric transducer element; and
a control circuit configured to:
readout a first sensor signal from the first transducer region of the piezoelectric transducer element based on a deflection of the deflectable structure;
determine a control signal from the readout first sensor signal, wherein the control signal has a counteracting effect on the deflection of the deflectable structure when provided to the piezoelectric transducer element;
provide the control signal to the first transducer region of the piezoelectric transducer element for counteracting the deflection of the deflectable structure; and
toggle between reading out the first sensor signal from the first transducer region of the piezoelectric transducer element and providing the control signal to the first transducer region of the piezoelectric transducer element,
wherein the first transducer region comprises a piezoelectric material disposed between a first readout terminal and a counter electrode, and
wherein the second transducer region comprises the piezoelectric material disposed between a second readout terminal and the counter electrode.