| CPC H01S 3/136 (2013.01) [H01S 3/117 (2013.01); H01S 3/1305 (2013.01); H01S 3/2232 (2013.01)] | 17 Claims |

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1. A Q-switched gas laser apparatus with pulse equalization, comprising:
a gas laser including a laser resonator having a Q-switch operable to switch the laser resonator between a high-loss state and a low-loss state to generate a pulsed laser beam;
a first sensor for obtaining a first measurement of the pulsed laser beam indicative of a laser pulse energy;
a second sensor for obtaining a second measurement of the pulsed laser beam indicative of a laser pulse duration; and
an electronic circuit communicatively coupled between the Q-switch and the first sensor and the second sensor and configured to operate the Q-switch to (a) repeatedly switch the laser resonator between the high-loss and low-loss states to set a repetition rate of laser pulses of the pulsed laser beam, (b) adjust a loss level of the low-loss state, based on the first measurement, to achieve a target laser pulse energy, and (c) adjust, based on the second measurement, a duration of the low-loss state to achieve a target laser pulse duration.
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