| CPC H01L 23/49822 (2013.01) [H01L 23/3121 (2013.01); H01L 24/16 (2013.01); H01L 2224/16227 (2013.01)] | 9 Claims |

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1. A substrate structure, comprising:
a substrate body having a packaging surface;
a circuit layer formed on the packaging surface, wherein the circuit layer comprises a plurality of conductive traces and a plurality of electrical contact pads bonded to the plurality of conductive traces, and the plurality of conductive traces are separated from each other;
an insulating filling layer formed on the packaging surface and disposed between the plurality of conductive traces, wherein a top surface of the circuit layer is free from being covered by the insulating filling layer; and
an insulating protective layer formed to cover a top surface of a first portion of the insulating filling layer and a first portion of the top surface of the circuit layer, wherein the insulating protective layer has at least one opening exposing the plurality of electrical contact pads and a second portion of the insulating filling layer,
wherein a wall of the at least one opening of the insulating protective layer and a top surface of the second portion of the insulating filling layer form a step-shaped structure,
wherein the insulating filing layer does not overlap with the circuit layer in a plan view above the substrate surface, and
wherein the plurality electrical contact pads include sidewalls exposed by the second portion of the insulating filling layer.
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