| CPC H01L 21/6833 (2013.01) | 11 Claims |
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1. A susceptor comprising a ceramic plate having an electrode disposed thereon,
wherein the ceramic plate comprises:
an electrode pad connected to the electrode; and
an electrode rod having one end connected to the electrode pad to supply power to the electrode,
wherein the electrode rod comprises:
an extension part connected to the electrode pad; and
a power connection part disposed at an end of a tapered portion of the extension part,
wherein the extension part including the tapered portion and the power connection part extending therefrom are integrally formed of a single same material.
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