US 12,469,732 B2
Pick-and-place system with a stabilizer
Jen-Yuan Chang, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jun. 19, 2024, as Appl. No. 18/748,025.
Application 18/748,025 is a continuation of application No. 17/700,497, filed on Mar. 22, 2022, granted, now 12,027,403.
Prior Publication US 2024/0339348 A1, Oct. 10, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/68 (2006.01); B65G 47/90 (2006.01); B65G 47/91 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/681 (2013.01) [B65G 47/905 (2013.01); B65G 47/91 (2013.01); H01L 21/67121 (2013.01); H01L 21/6838 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A pick-and-place system comprising:
a wafer holder;
a gantry over the wafer holder and comprising a stabilizer extending downwardly;
a primary drive mechanism connected to the gantry and configured to drive the gantry;
a secondary drive mechanism located at the gantry; and
a suction head, wherein the secondary drive mechanism is connected to the suction head and configured to drive the suction head.