US 12,469,728 B2
Manifold for a substrate container
Matthew Fuller, Colorado Springs, CO (US); Colton J. Harr, Monument, CO (US); and Ian Dutro, Colorado Springs, CO (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Mar. 4, 2021, as Appl. No. 17/192,715.
Claims priority of provisional application 62/986,142, filed on Mar. 6, 2020.
Prior Publication US 2021/0280446 A1, Sep. 9, 2021
Int. Cl. H01L 21/673 (2006.01)
CPC H01L 21/67389 (2013.01) [H01L 21/67386 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A substrate container, comprising:
a shell defining an interior space, the shell including a front opening, a first side wall, a second side wall, a rear wall, a bottom wall, and a front edge extending between opposing walls along the front opening of the shell; and
a manifold attached at the bottom wall, the top wall, the first sidewall and/or the second side wall closer to the front opening of the shell than the rear wall, the manifold including:
an inlet configured to receive a stream of purge gas; and
a gas distributing portion including a gas distributing surface configured to distribute the stream of purge gas into the interior space, the gas distributing portion including the gas distributing surface extending in a direction between opposing walls along a front edge of the shell, wherein the gas distributing surface includes a plurality of openings arranged along a length of the gas distributing surface between opposing walls.