| CPC H01L 21/67259 (2013.01) | 5 Claims |
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5. A substrate transfer apparatus for transferring a substrate to a processing apparatus that processes the substrate in a depressurized atmosphere,
wherein the processing apparatus includes a stage including a placement surface on which the substrate is placed and an annular stepped portion concentric with the placement surface, the annular stepped portion being provided to surround a peripheral edge of the placement surface and to protrude upward,
wherein the substrate transfer apparatus comprises:
a holder configured to hold the substrate and move the substrate to a delivery position in the processing apparatus;
a drive mechanism configured to move the holder; and
a controller,
wherein the controller is configured to output a control signal to perform:
obtaining a relationship between coordinates of the delivery position and an inclination of the substrate, which is delivered from the holder at the delivery position and placed on the stage; and
performing a correction operation of correcting the delivery position based on the relationship between the coordinates of the delivery position and the inclination of the substrate on the stage,
wherein the obtaining the relationship includes performing:
a placement operation of holding and moving, by the holder, a sensor-equipped substrate, which includes an inclination sensor provided on a substrate main body that imitates the substrate, to a temporary delivery position in the processing apparatus, and delivering the sensor-equipped substrate held by the holder at the temporary delivery position to the stage to place the sensor-equipped substrate on the stage; and
an inclination detection operation of detecting, by the inclination sensor, an inclination of the sensor-equipped substrate on the stage,
wherein the placement operation and the inclination detection operation are performed plural times while changing coordinates of the temporary delivery position stepwise, until a magnitude of the detected inclination of the sensor equipped substrate on the stage exceeds a threshold value, and subsequently the correction operation is performed,
wherein the coordinates of the temporary delivery position include a position that causes a portion of the sensor-equipped substrate, which is delivered from the holder to the stage, to be boarded on the stepped portion,
wherein the obtaining the relationship and the performing the correction operation are performed with respect to each of two directions orthogonal to each other in a horizontal plane, and
wherein the correction operation includes:
specifying a range of the coordinates of the temporary delivery position, which causes the magnitude of the detected inclination of the sensor-equipped substrate on the stage to be equal to or less than the threshold value; and
setting, as a corrected delivery position, a center of the range of the coordinates of the temporary delivery position.
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