US 12,469,680 B2
Radio-frequency (RF) matching network for fast impedance tuning
Yue Guo, Redwood City, CA (US); A N M Wasekul Azad, Santa Clara, CA (US); Kartik Ramaswamy, San Jose, CA (US); Nicolas J. Bright, Arlington, WA (US); and Yang Yang, San Diego, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 8, 2023, as Appl. No. 18/207,526.
Prior Publication US 2024/0412947 A1, Dec. 12, 2024
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/32128 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A tuning circuit, comprising:
a first impedance circuit coupled between a first terminal and a second terminal of the tuning circuit, wherein the first terminal is coupled to a generator and the second terminal is coupled to a load, the first impedance circuit being on a series path between the first terminal and the second terminal;
a second impedance circuit coupled between the first impedance circuit and a reference potential node; and
a signal path coupled to the first impedance circuit or the second impedance circuit, the signal path comprising an inductive element and a first switch coupled in parallel with the inductive element to form a parallel circuit, the parallel circuit being between the series path and the reference potential node, wherein a control input of the first switch is coupled to a control input of the tuning circuit configured to receive a control signal associated with a pulsed voltage (PV) waveform.