US 12,469,673 B2
Mems platform for thin film nanomechanics characterization
Maarten de Boer, Pittsburgh, PA (US); and Longchang Ni, Pittsburgh, PA (US)
Assigned to Carnegie Mellon University, Pittsburgh, PA (US)
Filed by Carnegie Mellon University, Pittsburgh, PA (US)
Filed on Dec. 15, 2022, as Appl. No. 18/082,543.
Claims priority of provisional application 63/289,775, filed on Dec. 15, 2021.
Prior Publication US 2023/0187167 A1, Jun. 15, 2023
Int. Cl. H01J 37/20 (2006.01); B81B 7/00 (2006.01)
CPC H01J 37/20 (2013.01) [B81B 7/0003 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/20264 (2013.01); H01J 2237/20271 (2013.01); H01J 2237/3151 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A micro-electromechanical system (MEMS) test platform, comprising:
a substrate;
a Tantalum (Ta) layer comprising a movable structure and a fixed portion, the movable structure being suspended over the substrate and configured to move relative to the substrate, and the fixed portion of the Ta layer being coupled to the substrate and fixed in place relative to the substrate; and
a test specimen comprising a first portion coupled to the movable structure and a second portion coupled to the fixed portion of the Ta layer, the movable structure configured apply a force to the test specimen when a shuttle of the Ta layer structure moves relative to the substrate.