US 12,469,671 B2
Stage apparatus and charged particle beam apparatus including stage apparatus
Akira Nishioka, Tokyo (JP); Motohiro Takahashi, Tokyo (JP); Masaki Mizuochi, Tokyo (JP); Yasuhiro Ando, Tokyo (JP); and Raifu Yamamoto, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Oct. 11, 2022, as Appl. No. 17/963,723.
Claims priority of application No. 2021-181598 (JP), filed on Nov. 8, 2021.
Prior Publication US 2023/0143197 A1, May 11, 2023
Int. Cl. H01J 37/20 (2006.01); H01J 37/26 (2006.01); H01J 37/30 (2006.01)
CPC H01J 37/20 (2013.01) [H01J 37/26 (2013.01); H01J 37/3007 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A stage apparatus comprising:
a first stage configured to move in a first direction;
a second stage configured to float from the first stage and move in a second direction orthogonal to at least the first direction;
a first cooling unit configured to cool a table of the first stage with a refrigerant; and
a control device configured to control an inclination of the second stage with reference to the table of the first stage cooled by the first cooling unit.