	US 12,469,670 B2
	Electron microscopy support
Christopher J. Russo, Cambridge (GB); and Katerina Naydenova, Cambridge (GB)
Assigned to United Kingdom Research and Innovation, Swindon (GB)
Appl. No. 17/914,188
Filed by United Kingdom Research and Innovation, Swindon (GB)
PCT Filed Mar. 24, 2021, PCT No. PCT/EP2021/057628 § 371(c)(1), (2) Date Sep. 23, 2022, PCT Pub. No. WO2021/191307, PCT Pub. Date Sep. 30, 2021.
Claims priority of application No. 2004272 (GB), filed on Mar. 24, 2020.
Prior Publication US 2023/0131360 A1, Apr. 27, 2023
Int. Cl. H01J 37/20 (2006.01); H01J 37/28 (2006.01)

CPC H01J 37/20 (2013.01) [H01J 37/28 (2013.01); H01J 2237/2001 (2013.01)]

17 Claims

1. A support for an electron microscopy sample, the support comprising a metallic foil having one or more holes therethrough wherein thickness of the metallic foil is less than 50 nm and/or the mean linear intercept grain size is 50 nm or less, wherein the ratio of the diameter of each hole to the thickness of the metallic foil is 15:1 or less, and wherein the metallic foil consists of either (a) one or more metals selected from transition metals, aluminium and beryllium, or an alloy thereof; or (b) degenerately doped silicon wherein the dopant element is selected from boron, aluminium, boron and arsenic at a concentration of 10²⁰atoms/cm³or higher.