US 12,469,669 B2
Printed circuit board for sealing vacuum system
Yongxin Wang, San Ramon, CA (US); Rui-Ling Lai, San Jose, CA (US); Nickolay Stepanenko, Helmond (NL); Jan Bex, Overpelt (BE); Ronny Hendrix, Velden (NL); Lidewij Elisa Cornelissen, Eindhoven (NL); and Robert Anton Brookhuis, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Aug. 20, 2021, as Appl. No. 17/408,267.
Claims priority of provisional application 63/184,067, filed on May 4, 2021.
Claims priority of provisional application 63/068,880, filed on Aug. 21, 2020.
Prior Publication US 2022/0059311 A1, Feb. 24, 2022
Int. Cl. H01J 37/16 (2006.01); H05K 1/02 (2006.01); H05K 1/03 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/16 (2013.01) [H05K 1/0201 (2013.01); H05K 1/0298 (2013.01); H05K 1/0306 (2013.01); H01J 37/244 (2013.01); H01J 2237/166 (2013.01); H01J 2237/182 (2013.01); H05K 1/0209 (2013.01); H05K 1/0271 (2013.01); H05K 2201/064 (2013.01); H05K 2201/068 (2013.01); H05K 2201/10151 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A system for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment, the system comprising:
a printed circuit board (PCB) comprising:
a first side for exposing to the atmospheric environment, and
a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side;
a rigid body on the first side of the PCB;
a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture; and
a flexure for exposure in the vacuum chamber environment, the flexure configured to provide mechanical support to the PCB; and
wherein the PCB is configured to provide an interface between the device within the vacuum chamber environment and the rigid body within the atmospheric environment.