US 12,469,666 B2
Lattice based voltage standoff
Adam M. McLaughlin, Merrimac, MA (US); and Craig R. Chaney, Gloucester, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 29, 2022, as Appl. No. 18/070,640.
Prior Publication US 2024/0177960 A1, May 30, 2024
Int. Cl. H01J 37/147 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/147 (2013.01) [H01J 37/3171 (2013.01); H01J 2237/032 (2013.01); H01J 2237/038 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An insulator, comprising:
a shaft having a first end and a second end; and
a shaft lattice disposed on an outer surface of the shaft.