US 12,469,665 B2
Charged particle beam device
Keigo Kasuya, Tokyo (JP); Shuhei Ishikawa, Tokyo (JP); Kenji Tanimoto, Tokyo (JP); Shunichi Watanabe, Tokyo (JP); Takashi Doi, Tokyo (JP); and Yusuke Sakai, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/691,071
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Oct. 19, 2021, PCT No. PCT/JP2021/038557
§ 371(c)(1), (2) Date Mar. 12, 2024,
PCT Pub. No. WO2023/067681, PCT Pub. Date Apr. 27, 2023.
Prior Publication US 2024/0379318 A1, Nov. 14, 2024
Int. Cl. H01J 37/073 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/073 (2013.01) [H01J 37/28 (2013.01); H01J 2237/04735 (2013.01); H01J 2237/06341 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A charged particle beam device comprising:
a cold field emitter including a tip having a sharpened distal end, a filament connected to the tip, and an auxiliary electrode covering the filament and having an opening from which the tip protrudes;
an extraction electrode to which an extraction voltage for extracting electrons from the cold field emitter is applied;
an acceleration electrode to which an acceleration voltage for accelerating the electrons extracted from the cold field emitter is applied;
a power supply configured to apply a positive voltage to the auxiliary electrode with respect to the tip; and
a current detector coupled to the auxiliary electrode and configured to measure a current caused by thermionic electrons emitted from the tip and the filament, when the tip and the filament are heated, that are collected by the auxiliary electrode during application of the positive voltage by the power supply.