US 12,469,664 B2
Charged particle gun and charged particle beam system
Masahiro Fukuta, Tokyo (JP); Keigo Kasuya, Tokyo (JP); and Noriaki Arai, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/917,305
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Apr. 23, 2020, PCT No. PCT/JP2020/017560
§ 371(c)(1), (2) Date Oct. 6, 2022,
PCT Pub. No. WO2021/214953, PCT Pub. Date Oct. 28, 2021.
Prior Publication US 2023/0178325 A1, Jun. 8, 2023
Int. Cl. H01J 37/07 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/07 (2013.01) [H01J 37/28 (2013.01); H01J 2237/061 (2013.01); H01J 2237/06375 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A charged particle gun comprising:
a charged particle source;
an extraction electrode that extracts charged particles from the charged particle source, allows some of the charged particles to pass therethrough, and blocks some other charged particles; and
a continuous heat transfer structure that is different from the extraction electrode and comes into contact with two or more surfaces including at least a perpendicular surface of the extraction electrode with respect to a traveling direction of the charged particles extracted from the charged particle source, facing the traveling direction and a surface of the extraction electrode parallel to the traveling direction, at an area or at a position opposed to the charged particle source with respect to the extraction electrode.