US 12,469,615 B2
Imaging device and image generation method
Takeshi Yamane, Tsukuba Ibaraki (JP)
Assigned to KIOXIA CORPORATION, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Aug. 25, 2023, as Appl. No. 18/456,311.
Claims priority of application No. 2022-149238 (JP), filed on Sep. 20, 2022.
Prior Publication US 2024/0096515 A1, Mar. 21, 2024
Int. Cl. G21K 7/00 (2006.01); G01N 23/083 (2018.01); G02B 21/06 (2006.01); G02B 21/26 (2006.01); G02B 21/36 (2006.01)
CPC G21K 7/00 (2013.01) [G01N 23/083 (2013.01); G02B 21/06 (2013.01); G02B 21/26 (2013.01); G02B 21/362 (2013.01); G02B 21/367 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An imaging device comprising:
a stage configured to place a subject;
a detector including a plurality of linear pixels having linear light receiving surfaces extending in a first direction arranged in a second direction orthogonal to the first direction with equal intervals;
an image formation optical member configured to form an image based on imaging light passing through the subject on a detection surface of the detector; and
an image processor configured to reconstruct the image of the subject based on detection intensity of the imaging light,
wherein the stage is scannable in a direction parallel to the first direction,
the detector is configured to set a sampling interval equal to or less than half a time to scan a distance of a line length of the linear pixel by the stage, and outputs the detection intensity at each sampling interval, and
the image processor is configured to: (i) determine that a detection intensity distribution indicating the detection intensity with respect to position coordinates of the stage is a convolution of an image intensity distribution on an extension line of the linear pixel and a window function; (ii) calculate the image intensity distribution for each linear pixel by deconvolution from the detection intensity distribution; and (iii) generate an image of the subject by disposing the image intensity distribution calculated in all the linear pixels in an arrangement direction of the linear pixels.