US 12,468,867 B2
Simulation method, simulation apparatus, computer readable medium, film forming apparatus, and method of manufacturing article
Shintaro Narioka, Tochigi (JP); Yuichiro Oguchi, Tokyo (JP); Sentaro Aihara, Tochigi (JP); and Ken Katsuta, Saitama (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 12, 2021, as Appl. No. 17/372,622.
Claims priority of application No. 2020-124644 (JP), filed on Jul. 21, 2020.
Prior Publication US 2022/0027533 A1, Jan. 27, 2022
Int. Cl. G06F 30/20 (2020.01); G06T 11/40 (2006.01)
CPC G06F 30/20 (2020.01) [G06T 11/40 (2013.01); G06T 2200/24 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of forming an actual film of a curable composition in a film forming apparatus that brings the curable composition arranged on a first member and a second member into contact with each other to form the actual film of the curable composition on the first member, the method comprising:
generating a drop setting file by performing an optimization process so as to fill a space between the first member and the second member with the curable composition without any gap, wherein in the drop setting file, a state of each of a plurality of droplets of the curable composition is defined as a nominal value;
obtaining a difference file including a difference between the nominal value and an actual value, which corresponds to the nominal value and occurs in the film forming apparatus, for each of the plurality of droplets;
generating a corrected drop setting file based on the drop setting file and the difference file;
simulating a behavior of the curable composition in the film forming apparatus using, as input information, the corrected drop setting file; and
causing the film forming apparatus to form the actual film of the curable composition on the first member according to a result of the simulating the behavior of the curable composition in the film forming apparatus using, as the input information, the corrected drop setting file.