US 12,468,348 B2
Method and system for intelligent selectivity of material application
Mudit Sunilkumar Khasgiwala, Milpitas, CA (US); and Subramani Kengeri, Saratoga, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 21, 2022, as Appl. No. 17/845,458.
Claims priority of provisional application 63/213,553, filed on Jun. 22, 2021.
Prior Publication US 2022/0404878 A1, Dec. 22, 2022
Int. Cl. G06F 1/16 (2006.01); G06F 1/20 (2006.01)
CPC G06F 1/1656 (2013.01) [G06F 1/206 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of controlling processes for applying material to an electronic device, the method comprising:
generating an electromagnetic (EM) map of an electronic device that indicates locations of EM radiation emitted from the electronic device;
generating a thermal map of the electronic device that indicates locations of thermal energy emitted from the electronic device;
generating, from the EM map and the thermal map, a shielding map comprising instructions to control a shielding apparatus, comprising:
locations on the electronic device to apply an EM shielding material; and
locations on the electronic device to apply a thermal material; and
controlling, using the shielding map, a shielding apparatus to apply the EM shielding material and the thermal material to the electronic device.