US 12,468,086 B1
Silicon nitride-to-silicon waveguide assembly for broadband communication including concurrent propagation by TE0 and TM0 modes
Nathan Lin, San Jose, CA (US); Yun Wang, Ottawa (CA); and Jie Lin, Cupertino, CA (US)
Assigned to Marvell Asia Pte Ltd, Singapore (SG)
Filed by Marvell Asia Pte Ltd, Singapore (SG)
Filed on Mar. 1, 2023, as Appl. No. 18/116,140.
Claims priority of provisional application 63/316,011, filed on Mar. 3, 2022.
Int. Cl. G02B 6/12 (2006.01); G02B 6/02 (2006.01); G02B 6/122 (2006.01); G02B 6/125 (2006.01)
CPC G02B 6/12004 (2013.01) [G02B 6/02 (2013.01); G02B 6/1228 (2013.01); G02B 6/125 (2013.01); G02B 2006/12061 (2013.01)] 30 Claims
OG exemplary drawing
 
1. A waveguide assembly comprising:
a first waveguide having at least a portion formed of silicon, the first waveguide comprising a first end, a second end, an end member, and one or more tapered members, the end member extending from the first end, and the one or more tapered members extending from the end member to the second end; and
a second waveguide optically coupled to and spaced away from the first waveguide, the second waveguide comprising silicon nitride, a first member, a second member, and a non-tapered member, the non-tapered member extending from the first member to the second member and in parallel with and opposing a portion of the one or more tapered members, an effective refractive index of the non-tapered member matching an effective refractive index of the one or more tapered members at a first plane, the first plane extending through the non-tapered member and the one or more tapered members and perpendicular to a second plane, and the second plane extending parallel to a direction of overlap between the first waveguide and the second waveguide.