US 12,467,952 B2
Probe card and semiconductor test method using the same
Byungwook Choi, Seoul (KR); and Seong Yeon Wi, Suwon-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); and WILL TECHNOLOGY CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Dec. 16, 2022, as Appl. No. 18/083,184.
Claims priority of application No. 10-2022-0005560 (KR), filed on Jan. 13, 2022.
Prior Publication US 2023/0221351 A1, Jul. 13, 2023
Int. Cl. G01R 1/073 (2006.01); G01R 1/067 (2006.01)
CPC G01R 1/07342 (2013.01) [G01R 1/06738 (2013.01); G01R 1/06755 (2013.01); G01R 1/07357 (2013.01); G01R 1/07378 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A probe card, comprising:
a lower plate including a first lower through hole and a second lower through hole;
an upper plate including a first upper through hole and a second upper through hole, and spaced apart from the lower plate in a vertical direction;
a first needle that extends vertically to penetrate the first lower through hole and the first upper through hole; and
a second needle that extends vertically to penetrate the second lower through hole and the second upper through hole,
wherein each of the first and second needles comprises:
a first member that extends vertically and comprises a first material; and
a second member horizontally connected to the first member,
wherein the second member comprises a second material different from the first material,
wherein each of the first and second upper through holes comprises:
a first surface and second surface spaced apart from each other in a first horizontal direction perpendicular to the vertical direction, the first surface and the second surface extending in a second horizontal direction perpendicular to the vertical direction and the first horizontal direction; and
a third surface and a fourth surface spaced apart from each other in the second horizontal direction, the third surface and the fourth surface extending in the first horizontal direction,
wherein the first needle is deformed by pressure to contact the first and third surfaces of the first upper through hole and being spaced apart from the second and fourth surfaces of the first upper through hole,
wherein the second needle is deformed by pressure to contact the first and third surfaces of the second upper through hole and the second needle is spaced apart from the second and fourth surfaces of the second upper through hole.