| CPC G01R 1/07307 (2013.01) [G01R 1/06772 (2013.01); G01R 1/07321 (2013.01)] | 9 Claims |

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1. A probe device, comprising:
a first probe structure, comprising:
a first body;
a first substrate, disposed on the first body; and
a plurality of first probes, electrically connected to the first substrate and protruding from a surface of the first substrate;
a second probe structure, comprising:
a second body, having a plurality of through holes;
a second substrate, disposed on the second body; and
a plurality of second probes, electrically connected to the second substrate, wherein the plurality of second probes protrude from a surface of the second body via the plurality of through holes, respectively; and
a circuit board, wherein the first probe structure is disposed in a first region of the circuit board, and the second probe structure is disposed in a second region of the circuit board, wherein the first region surrounds the second region,
wherein a length of the plurality of first probes is different from a length of the plurality of second probes, and
wherein the first probe structure is free from having a through hole.
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