US 12,467,941 B2
Sensor and electronic device
Kei Masunishi, Kawasaki Kanagawa (JP); Etsuji Ogawa, Kawasaki Kanagawa (JP); Yasushi Tomizawa, Fuchu Tokyo (JP); Fumito Miyazaki, Yokohama Kanagawa (JP); Daki Ono, Yokohama Kanagawa (JP); Kengo Uchida, Kawasaki Kanagawa (JP); Hiroki Hiraga, Saitama Saitama (JP); Shiori Kaji, Kawasaki Kanagawa (JP); and Hideaki Murase, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Kawasaki (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 27, 2023, as Appl. No. 18/175,242.
Claims priority of application No. 2022-146096 (JP), filed on Sep. 14, 2022.
Prior Publication US 2024/0085451 A1, Mar. 14, 2024
Int. Cl. G01P 15/097 (2006.01); G01P 15/08 (2006.01); G01P 15/18 (2013.01)
CPC G01P 15/097 (2013.01) [G01P 15/08 (2013.01); G01P 15/0802 (2013.01); G01P 15/18 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a base body;
a support portion fixed to the base body; and
a first member supported by the support portion,
a gap being provided between the base body and a part of the first member,
the first member including a supported region, a first movable region, a first structure, a first support structure, a first connection structure, a first connect portion, and a first beam,
the support portion being located between the base body and the supported region in a first direction from the base body to the support portion,
the first beam extending along a second direction crossing the first direction,
a first beam position of the first beam in the second direction being located between a first movable region position of the first movable region in the second direction and a support portion position of the support portion in the second direction,
a first end of the first beam being connected to the first connection structure,
a first other end of the first beam being connected to the supported region,
a first structure position of the first structure in the second direction being located between the first movable region position and the first beam position,
a first connection structure position of the first connection structure in the second direction being located between the first structure position and the first beam position,
a first support structure position of the first support structure in the second direction being located between the first structure position and the support portion position,
the first structure including a first portion, a first other portion, and a first intermediate portion,
a third direction from the first portion to the first other portion crossing a plane including the first direction and the second direction,
the first intermediate portion being between the first portion and the first other portion,
the first portion being connected to the first connection structure,
the first other portion being connected to the first movable region,
the first intermediate portion being connected to the first support structure, and
the first connect portion connecting the first connection structure to the first support structure.