US 12,467,903 B2
Detector device
Kei Ikuta, Kameyama (JP); Takeshi Hara, Kameyama (JP); Tomoko Teranishi, Kameyama (JP); and Tomohiro Kosaka, Kameyama (JP)
Assigned to Sharp Display Technology Corporation, Kameyama (JP)
Appl. No. 18/276,619
Filed by Sharp Display Technology Corporation, Kameyama (JP)
PCT Filed Apr. 19, 2021, PCT No. PCT/JP2021/015850
§ 371(c)(1), (2) Date Aug. 9, 2023,
PCT Pub. No. WO2022/224299, PCT Pub. Date Oct. 27, 2022.
Prior Publication US 2024/0310329 A1, Sep. 19, 2024
Int. Cl. G01N 27/624 (2021.01)
CPC G01N 27/624 (2013.01) 13 Claims
OG exemplary drawing
 
1. A detector device comprising:
a pair of filter electrodes that are disposed opposite each other;
a collector electrode collecting charged particles that pass through a space between the pair of filter electrodes; and
a detection circuit connected to the collector electrode and detecting an amount of the charged particles that are collected, wherein
the collector electrode includes
an upper electrode layer having a collection surface that receives the charged particles,
a lower electrode layer that is disposed opposite a surface of the upper electrode layer that is an opposite surface from the collection surface, and
an insulation layer having an insulation property and disposed between the upper electrode layer and the lower electrode layer, and
the detection circuit is configured to be connected to one of the upper electrode layer and the lower electrode layer.