| CPC G01N 27/44791 (2013.01) [B01L 3/502707 (2013.01); B01L 3/50273 (2013.01); C12Q 1/6869 (2013.01); G01N 27/3278 (2013.01); G01N 27/453 (2013.01); G01N 33/48721 (2013.01); B01L 2300/0645 (2013.01); B01L 2300/161 (2013.01); B01L 2400/0421 (2013.01); B01L 2400/0427 (2013.01)] | 20 Claims |

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1. A device, comprising:
a substrate;
a conductive layer disposed in a top portion of the substrate;
an electrode layer disposed on the conductive layer;
a dielectric layer disposed on the electrode layer;
a recess in the dielectric layer, the recess exposing a portion of the electrode layer and having a recess sidewall formed by the dielectric layer and a recess bottom on the exposed portion of the electrode layer; wherein the recess bottom is hydrophilic, a lower portion of the recess sidewall is hydrophilic, and an upper portion of the recess sidewall is hydrophobic.
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