US 12,467,893 B2
Test device for determining an effective work function, method of manufacturing the same and method of determining an effective work function
Gyeong Ho Hyun, Icheon-si (KR)
Assigned to SK hynix Inc., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si (KR)
Filed on May 3, 2023, as Appl. No. 18/311,772.
Claims priority of application No. 10-2022-0129851 (KR), filed on Oct. 11, 2022.
Prior Publication US 2024/0118332 A1, Apr. 11, 2024
Int. Cl. G01N 27/00 (2006.01); G01R 31/26 (2020.01); G11C 29/00 (2006.01); H01L 21/66 (2006.01); H10D 64/01 (2025.01)
CPC G01N 27/002 (2013.01) [G01R 31/2601 (2013.01); H01L 22/14 (2013.01); H10D 64/037 (2025.01); G11C 29/006 (2013.01); H01L 22/30 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A test device for determining an effective work function, the test device comprising:
a test memory device including a memory layer and a gate electrode layer on a semiconductor substrate;
an insulation layer on the test memory device; and
a charge injection electrode on the insulation layer to inject a charge into the test memory device based on a voltage applied to the charge injection electrode.