US 12,467,802 B2
Membrane of a sensor with multiple deflectable sections for different ranges of a sensed force or pressure
Ya-Mei Chen, Fremont, CA (US)
Assigned to TE CONNECTIVITY SOLUTIONS GmbH, Schaffhausen (CH)
Filed by Measurement Specialties, Inc., Hampton, VA (US)
Filed on Oct. 18, 2022, as Appl. No. 17/968,153.
Prior Publication US 2024/0125658 A1, Apr. 18, 2024
Int. Cl. G01L 1/18 (2006.01); G01L 9/06 (2006.01)
CPC G01L 1/18 (2013.01) [G01L 9/06 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A body of a sensor, comprising:
a wafer having a cavity; and
a membrane deflectable into the cavity under an applied force, the membrane is formed in a single piece of a silicon material and has a lower surface facing the cavity, the membrane has a first section and a second section positioned through the membrane, the first section of the membrane is more deflectable than the second section in a first range of the applied force and the second section is more deflectable than the first section in a second range of the applied force that is different than the first range, the lower surface of the membrane directly abuts a surface within the cavity integrated with a wall of the wafer in the second range of the applied force.