US 12,467,459 B2
Diagnosis method, diagnosis apparatus, and diagnosis system
Kenta Sato, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Mar. 24, 2023, as Appl. No. 18/189,523.
Claims priority of application No. 2022-049467 (JP), filed on Mar. 25, 2022.
Prior Publication US 2023/0304498 A1, Sep. 28, 2023
Int. Cl. F04C 28/28 (2006.01); F04C 18/16 (2006.01); G01H 9/00 (2006.01); G01P 15/18 (2013.01)
CPC F04C 28/28 (2013.01) [F04C 18/16 (2013.01); G01H 9/00 (2013.01); G01P 15/18 (2013.01); F04C 2270/80 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A diagnosis method comprising:
a physical quantity detection step of detecting accelerations along three axes orthogonal to one another by using acceleration sensors, the accelerations being generated due to a vibration of a vacuum pump during operation thereof, the vacuum pump being vibrated around a two-dimensional vibration plane;
a Lissajous figure generation step of generating a three-dimensional Lissajous figure by plotting time-series signals corresponding to the detected accelerations in a three-dimensional coordinate system including a first axis, a second axis, and a third axis as the three axes;
a vibration plane information acquisition step of acquiring information on the two-dimensional vibration plane of the vibration from the three-dimensional Lissajous figure generated in the Lissajous figure generation step; and
a diagnosis step of diagnosing a state of the vacuum pump based on the information of the two-dimensional vibration plane, the information indicating an inclination of the two-dimensional vibration plane with respect to a reference axis.