US 12,467,144 B2
Methods of correlating zones of processing chambers, and related systems and methods
Zuoming Zhu, Sunnyvale, CA (US); Ala Moradian, Sunnyvale, CA (US); Shu-Kwan Lau, Sunnyvale, CA (US); Manjunath Subbanna, Bangalore (IN); Errol Antonio C. Sanchez, Tracy, CA (US); Abhishek Dube, Fremont, CA (US); Erika R. Warrick, San Jose, CA (US); Martin Jeffrey Salinas, San Jose, CA (US); and Chandra Mohapatra, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 20, 2022, as Appl. No. 18/085,402.
Claims priority of application No. 202241061139 (IN), filed on Oct. 27, 2022.
Prior Publication US 2024/0141498 A1, May 2, 2024
Int. Cl. C23C 16/52 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/52 (2013.01) [C23C 16/4481 (2013.01); C23C 16/45561 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of correlating zones of a processing chamber having a processing volume, comprising:
partitioning the processing volume into a plurality of zones along a first direction of the processing volume and a second direction of the processing volume, the second direction intersecting the first direction, the plurality of zones having:
a first zone number (m), and
a second zone number (n);
determining a group number, the determining of the group number comprising:
determining a first value and a second value, the first value correlating to the first zone number (m) of the plurality of zones and the second value correlating to the second zone number (n) of the plurality of zones
multiplying the first value by the second value;
grouping the plurality of zones into a plurality of groups, the plurality of groups having a number that is equal to the group number; and
connecting one or more gas lines to each respective group of the plurality of groups such that the same one or more gas lines fluidly connect to a subset of the plurality of zones grouped into the respective group.