US 12,467,135 B2
Resistive coating for a capillary
Richard G. Closser, Mountain View, CA (US); and Elizabeth Carr, Mountain View, CA (US)
Assigned to AGILENT TECHNOLOGIES, INC., Santa Clara, CA (US)
Appl. No. 18/025,166
Filed by AGILENT TECHNOLOGIES, INC., Santa Clara, CA (US)
PCT Filed Sep. 29, 2021, PCT No. PCT/US2021/052605
§ 371(c)(1), (2) Date Mar. 7, 2023,
PCT Pub. No. WO2022/093468, PCT Pub. Date May 5, 2022.
Application 18/025,166 is a continuation of application No. PCT/US2021/056833, filed on Oct. 27, 2021.
Claims priority of provisional application 63/107,512, filed on Oct. 30, 2020.
Prior Publication US 2023/0313366 A1, Oct. 5, 2023
Int. Cl. C23C 16/40 (2006.01); C09D 1/00 (2006.01); C23C 16/04 (2006.01); C23C 16/455 (2006.01); C23C 16/56 (2006.01); H01J 49/04 (2006.01)
CPC C23C 16/403 (2013.01) [C09D 1/00 (2013.01); C23C 16/045 (2013.01); C23C 16/45529 (2013.01); C23C 16/45555 (2013.01); C23C 16/56 (2013.01); H01J 49/0404 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A coated capillary tube having a tunable resistance coating in an ion transfer device, comprising:
an inlet end in communication with an atmospheric-pressure ion source;
an outlet end in communication with a vacuum region of a mass spectrometer;
a body elongated along an axis from the inlet end to the outlet end;
an inside surface defining a bore having an inner diameter; and
a resistive coating on the inside surface of the capillary tube, the resistive coating comprising:
at least one layer of a metal comprising metal oxides or metal nitrides, and discrete metal particles of a different metal embedded in the at least one layer of the metal.