US 12,467,131 B2
Fabrication methods for 3D structures based on rolling-up kirigami techniques
Lixin Dong, Kowloon (HK); Kun Wang, Kowloon (HK); Chaojian Hou, Kowloon (HK); and Zhang Wenqi, Kowloon (HK)
Assigned to City University of Hong Kong, Kowloon (HK)
Filed by City University of Hong Kong, Kowloon (HK)
Filed on Oct. 3, 2023, as Appl. No. 18/480,224.
Prior Publication US 2025/0109487 A1, Apr. 3, 2025
Int. Cl. C23C 14/58 (2006.01); C23C 14/02 (2006.01); C23C 14/14 (2006.01); C23C 14/30 (2006.01); C23C 16/34 (2006.01); C23C 16/513 (2006.01); C23C 16/56 (2006.01); C23C 28/00 (2006.01)
CPC C23C 14/5873 (2013.01) [C23C 14/028 (2013.01); C23C 14/14 (2013.01); C23C 14/30 (2013.01); C23C 16/345 (2013.01); C23C 16/513 (2013.01); C23C 16/56 (2013.01); C23C 28/32 (2013.01); C23C 28/34 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
forming a first layer of a first material on a first portion of a substrate;
forming a second layer of a second material on the first layer and a second portion of the substrate;
forming a third layer of a third material on a first portion of the second layer, wherein a pattern based on a two-dimensional pinwheel-shaped pattern is formed into the third layer when forming the third layer; and
transforming at least a portion of the third layer into a three-dimensional structure based in part on removing a second portion of the second layer and at least a portion of the first layer.
 
16. A method comprising:
forming a first material layer on a first portion of a substrate, the first material layer including aluminum;
forming a second material layer on the first material layer and a second portion of the substrate, the second material layer including silicon nitride;
forming a third material layer on a first portion of the second material layer, the third material layer including gold, wherein a pinwheel-shaped pattern is formed into the third material layer when forming the third material layer; and
transforming at least a portion of the third material layer into a three-dimensional structure by removing a second portion of the second material layer and at least a portion of the first material layer thereby causing a plurality of third portions of the second material layer to deform and guide the third material layer into the three-dimensional structure.